4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Nam Le

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Detecting chemiluminescent radiation in the cleaning of a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Film removal employing a remote plasma source

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for reducing particle contamination on...

Coating apparatus – Gas or vapor deposition – With treating means
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Profile ID: LFUS-PAI-P-2436612

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