4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Nalin Patadia

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Full face mask for capacitance-voltage measurements

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Non-intrusive, on-the-fly (OTF) temperature measurement and...

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate

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Substrate support and lift apparatus and method

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Substrate support and lift apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-899682

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