4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate

N. Mark Williams

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Method and apparatus for producing MIIIN columns and MIIIN...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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MIIIN based materials and methods and apparatus for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Non-thermionic sputter material transport device, methods of...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Single crystal group III nitride articles and method of...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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