4. Bearings
  5. Linear bearing
  6. Fluid bearing

Motomu Furukawa

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Driving mechanism with gas bearing

Motors: expansible chamber type – With motive fluid valve – Responsive to motor position or orientation
Patent

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Movable stage mechanism

Work holders – Holder mounted for movement – With plural means for changing holder positions
Patent

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Static pressure bearing

Bearings – Linear bearing – Fluid bearing
Patent

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Profile ID: LFUS-PAI-P-1038206

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