4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Motohiro Tanaka

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Oil mist discharger

Fluid sprinkling – spraying – and diffusing – Including supply holder for material – To be mixed – dissolved or entrained in a flowing liquid...
Reexamination Certificate

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Plasma processing apparatus and plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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