4. Electrical generator or motor structure
  5. Non-dynamoelectric
  6. Charge accumulating

Mingching Wu

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Integration manufacturing process for MEMS device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Method for making micro-electromechanical system devices

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Two-axis device and manufacturing method therefor

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Profile ID: LFUS-PAI-P-3042881

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