4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Ming-Han Liao

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Narrow channel width effect modification in a shallow trench...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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STI stress modulation with additional implantation and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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