4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Michael Liehr

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Apparatus for the plasma-chemical deposition of polycrystalline

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Arrangement for producing plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Device for plasma generation

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Device for producing plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Device for producing plasma

Electric lamp and discharge devices – Fluent material supply or flow directing means – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-354587

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