4. Chucks or sockets
  5. Miscellaneous

Michael J. Lombardi

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Apparatus and methods for manipulating semiconductor wafers

Material or article handling – Elevator or hoist and loading or unloading means therefor – Grab
Reexamination Certificate

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Apparatus and methods for manipulating semiconductor wafers

Chucks or sockets – Miscellaneous
Reexamination Certificate

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Vacuum-processing chamber-shield and multi-chamber pumping...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2574701

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