4. Coating processes
  5. Coating by vapor, gas, or smoke

Michael J. Churley

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Apparatus for elimination of low temperature ammonia salts in Ti

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Elimination of low temperature ammonia salt in TiCl.sub.4 NH.sub

Coating processes – Coating by vapor – gas – or smoke
Patent

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Process for forming low resistivity titanium nitride films

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
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Processing for forming low resistivity titanium nitride films

Coating processes – Coating by vapor – gas – or smoke
Patent

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Profile ID: LFUS-PAI-P-513637

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