4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Michael C. Vella

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Charge exchange molecular ion source

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Double chamber ion implantation system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Magnetic filter apparatus and method for generating cold plasma

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermal regulation of an ion implantation system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1194833

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