4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Michael B. Rattner

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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Method of etching variable depth features in a crystalline...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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