4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Miao-Ju Hsu

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Method and system for processing multi-layer films

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Post etch copper cleaning using dry plasma

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Post etch copper cleaning using dry plasma

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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