4. Chemistry of inorganic compounds
  5. Carbon or compound thereof
  6. Elemental carbon

Meyya Meyyappan

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Carbon nanotube interconnect

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Detection of presence of chemical precursors

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
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Functionalization of carbon nanotubes

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
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Gas composition sensing using carbon nanotube arrays

Measuring and testing – Gas analysis
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Gas composition sensing using carbon nanotube arrays

Measuring and testing – Gas analysis
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Profile ID: LFUS-PAI-P-2166150

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