4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Mei-Ru Kuo

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Masking layer method for forming a spacer layer with...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Multiple etch method for fabricating spacer layers

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Selectivity oxide-to-oxynitride etch process using a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2493942

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