4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Matthias Aikele

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Method for producing insulation structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Microsensor with a resonator structure

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Sensor having a resonance structure, especially an...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2289538

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