Coating processes
Direct application of electrical, magnetic, wave, or...
Polymerization of coating utilizing direct application of...
Inventor
active
Electron beam modification of CVD deposited films, forming...
Electron beam modification of CVD deposited low dielectric...
Electron beam modification of perhydrosilazane spin-on glass
Electron beam treatment of siloxane resins
Enhancement of photoresist plasma etch resistance via...
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Profile ID: LFUS-PAI-P-2022452