4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Matthew R. Trattles

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Method to monitor pad wear in CMP processing

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Residual oxygen reduction system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Visual wear confirmation polishing pad

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2654119

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