4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate

Mathieu Rosa Jozef Caymax

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Method and apparatus for forming expitaxial layers

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
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Method of epitaxial deoposition of an n-doped silicon layer

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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