4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Masatomo Takeichi

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Dry etching method and a TFT fabrication method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Liquid crystal display device and method for fabricating the...

Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Electrical excitation of liquid crystal
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Liquid crystal display device and method for fabricating the...

Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Electrical excitation of liquid crystal
Reexamination Certificate

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Thin film transistor formed by an etching process with high...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
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Thin film transistor formed by an etching process with high...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Profile ID: LFUS-PAI-P-2053038

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