4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Masanari Yokogawa

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Semiconductor wafer treatment member

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2420307

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