4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Masaki Ogata

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Communications – electrical: acoustic wave systems and devices – Echo systems
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Method for forming contact holes and semiconductor device...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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