4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Masahiko Yotuyanagi

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Method of making a solar energy collector element

Coating processes – Electrical product produced – Carbon coating
Patent

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Surface processing apparatus utilizing microwave plasma

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-371952

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