4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Masahiko Suzuki, deceased

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Charged particle beam exposure system and method of compensating

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Magnetic object lens for an electron beam exposure apparatus whi

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-753067

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