4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Martin Bring

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Hidden hinge MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Hidden hinge MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Method of manufacturing monocrystalline silicon micromirrors

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2223718

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