4. Abrading
  5. Machine
  6. Rotary tool

Mark Meloni

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Method and apparatus for in-situ measurement of workpiece...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Non-abrasive conditioning for polishing pads

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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System and method for detecting CMP endpoint via direct...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Workpiece carrier with segmented and floating retaining...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2046165

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