4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Mark Asta

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Method for enhancing the solubility of boron and indium in...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Semiconductor material and method for enhancing solubility...

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Semiconductor material and method for enhancing solubility...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2513189

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