4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Mark Allen George

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Gas control device and method of supplying gas

Fluid handling – Systems – Multiple inlet with multiple outlet
Reexamination Certificate

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Gas control device and method of supplying gas

Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
Reexamination Certificate

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Gas control device and method of supplying gas

Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate

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Gas phase removal of SiO.sub.2 /metals from silicon

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-392343

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