4. Fluid handling
  5. Line condition change responsive valves
  6. Pilot or servo controlled

Mariusch Gregor

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Apparatus and method for regulating a pressure in a chamber

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
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Electromagnetically levitated substrate support

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2003696

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