4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Electrical characteristic sensed

Mario Pita

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Method for controlling trench depth in shallow trench...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Including isolation structure
Reexamination Certificate

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Migration from control wafer to product wafer particle checks

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
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Process for improving line width variations between tightly...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Semiconductor device having reduced line width variations...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1768871

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