Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
active
Bilayer anti-reflective coating and etch hard mask
Bilayer anti-reflective coating and etch hard mask
Elimination of oxynitride (ONO) etch residue and polysilicon str
Elimination of oxynitride (ONO) etch residue and polysilicon str
Elimination of oxynitride (ONO) etch residue and polysilicon str
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