4. Coating apparatus
  5. Control means responsive to a randomly occurring sensed...
  6. Responsive to condition of coating material

Mao-I Ting

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Bubble detection system for detecting bubbles in photoresist...

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
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Critical dimension statistical process control in...

Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system – Circuit simulation
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True defect monitoring through repeating defect deletion

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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