4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Manuel Herrera

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Autoclave bonding of sputtering target assembly

Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate

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Sputtering device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Sputtering device and target with cover to hold cooling fluid

Metal fusion bonding – Process – Diffusion type
Patent

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Sputtering device and target with cover to hold cooling fluid

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering device and target with cover to hold cooling fluid

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1536526

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