4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Madelon Gertruda Josephina Rovers

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Method of wet etching a silicon and nitrogen containing...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Method of wet etching an inorganic antireflection layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2864252

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