4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Luciano Mule′Stagno

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Epitaxial wafer substantially free of grown-in defects

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Process for detecting agglomerated intrinsic point defects...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2474560

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