4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Linda Braly

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Method for planarization etch with in-situ monitoring by...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Multi-step method for etching strain gate recesses

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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