4. Coating apparatus
  5. Gas or vapor deposition

Lily Pang

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Gas distribution system for a CVD processing chamber

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Gas distribution system for a CVD processing chamber

Coating apparatus – Gas or vapor deposition
Patent

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Profile ID: LFUS-PAI-P-1585798

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