4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Li-Chi Chao

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Edge defect inhibited trench etch plasma etch method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Film stack and etching sequence for dual damascene

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2135844

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