4. Fluid handling
  5. Line condition change responsive valves
  6. Pilot or servo controlled

Leybold Vacuum GmbH

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Apparatus and method for regulating a pressure in a chamber

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent

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Vacuum pump

Rotary kinetic fluid motors or pumps – With lubricating – sealing – packing or bearing means having... – For shaft sealing – packing – lubricating or bearing means
Reexamination Certificate

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