Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Corporate Assignee
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Cobalt base alloy sputtering target with high magnetic field...
Cobalt base alloy target for a magnetron cathode sputtering syst
Process for the production of partially reduced indium oxide-tin
Process for the recycling of spent indium oxide-tin oxide sputte
Target for the sputtering cathode of a vacuum coating apparatus
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