4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Lester A. D'Cruz

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Multi-stage curing of low K nano-porous films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Techniques promoting adhesion of porous low K film to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3197527

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