4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Forming nonplanar surface

Leo Lawrence Linehan

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Antireflective coating for microlithography

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate
Reexamination Certificate

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Method for patterning a photoresist material wherein an anti-ref

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Profile ID: LFUS-PAI-P-31558

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