4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Lawrence C. Lane

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Apparatus for preventing deposition on frontside peripheral regi

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Exclusion guard and gas-based substrate protection for chemical

Coating apparatus – Gas or vapor deposition
Patent

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Exclusion guard and gas-based substrate protection for chemical

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1015408

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