4. Measuring and testing
  5. Gas analysis
  6. With compensation detail

Laszlo Szalai

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Compact particle flux monitor

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Surface volatile material detector

Measuring and testing – Gas analysis – With compensation detail
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Valve closure mechanism for semiconductor deposition apparatus

Receptacles – Closures – With closure opening arrangements for means
Patent

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Profile ID: LFUS-PAI-P-315029

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