4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

LAM Research Corporation

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Acoustic detection of dechucking and apparatus therefor

Measuring and testing – Vibration – By mechanical waves
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Chamber configuration for confining a plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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De-fluoridation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Fullerene coated component of semiconductor processing...

Metal working – Barrier layer or semiconductor device making
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H2O vapor as a processing gas for crust, resist, and residue...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Removal of imaged layers
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