4. Coating apparatus
  5. Gas or vapor deposition

Kyu-bok Ryu

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AC power supply controller for use in semiconductor fabrication

Electrical transmission or interconnection systems – Plural supply circuits or sources – Substitute or emergency source
Patent

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Construction for coupling two tubes

Pipe joints or couplings – Packed – Frictional retention upon insertion
Patent

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Tube apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition
Patent

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Profile ID: LFUS-PAI-P-808271

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