4. Optics: measuring and testing
  5. Photometers
  6. Photoelectric

Kuno Backhaus

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Arrangement and method for inspecting unpatterned wafers

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method and apparatus for monitoring the light emitted from...

Optics: measuring and testing – Photometers – Photoelectric
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Optical measurement arrangement, in particular for layer...

Optics: measuring and testing – By light interference – For dimensional measurement
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Profile ID: LFUS-PAI-P-2440444

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