4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Electrical characteristic sensed

Kun-Yue Lee

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Junction leakage monitor for MOSFETs with silicide contacts

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
Reexamination Certificate

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Method for forming junction leakage monitor for mosfets with sil

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Patent

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