4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Kuen-Jian Chen

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Gas delivering apparatus for chemical vapor deposition

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Method of planarization

Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate

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Multi-step high density plasma chemical vapor deposition process

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Profile ID: LFUS-PAI-P-1817812

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