4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Kuang-Yung Wu

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Gas ring apparatus for semiconductor etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Method to reduce the particles in load-lock chamber

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Silicon etching process

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1899080

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